| 摘要 |
PURPOSE: An illumination measuring apparatus for an excimer lamp is provided to conveniently measure the intensity of a vacuum ultraviolet ray. CONSTITUTION: An illumination measuring apparatus(10) for an excimer lamp comprises a light receiving sensor(12) and a housing(11). The light receiving sensor senses the vacuum ultraviolet ray. A gas inlet(15) and a gas flow path(16) are installed in the housing. The gas inlet is installed at the location facing the light-receiving surface of the light receiving sensor. The inactive gas is introduced to the gas inlet. The gas flow path is expanded from the gas inlet to a light guide space.
|
