发明名称 |
SILICON TETRAFLUORIDE SYNTHESIS METHOD |
摘要 |
FIELD: chemistry. ^ SUBSTANCE: invention can be used in making in electronic industry during production of solar cells. Sodium silicofluoride is pre-dried at temperature of up to 300C and residual pressure of up to 2 mm Hg. At the first thermal decomposition step, sodium silicofluoride is heated to 620-650C with constant removal of the released silicon tetrafluoride at residual pressure of up to 30 mm Hg. At the second step the remaining mass is heated to temperature not lower than 750C, while also constantly removing silicon tetrafluoride at pressure not higher than 30 mm Hg. ^ EFFECT: invention enables to avoid agglomeration and melting of the reaction mass and obtain pure silicon tetrafluoride with output of over 99%. ^ 2 tbl, 1 ex |
申请公布号 |
RU2399583(C1) |
申请公布日期 |
2010.09.20 |
申请号 |
RU20090104271 |
申请日期 |
2009.02.09 |
申请人 |
ROSSIJSKAJA FEDERATSIJA, OT IMENI KOTOROJ VYSTUPAET GOSUDARSTVENNAJA KORPORATSIJA PO ATOMNOJ EHNERGII (ROSATOM);OTKRYTOE AKTSIONERNOE OBSHCHESTVO "VEDUSHCHIJ NAUCHNO-ISSLEDOVATEL'SKIJ INSTITUT KHIMICHESKOJ TEKHNOLOGII" |
发明人 |
KVARATSKHELI JURIJ KONSTANTINOVICH;KONDRAT'EV ALEKSANDR GEORGIEVICH;NIKONOV VALERIJAN IVANOVICH;DEMIN JURIJ VIKTOROVICH;FADEEV LEONID LEONIDOVICH;KHOROZOVA OL'GA DMITRIEVNA |
分类号 |
C01B33/107 |
主分类号 |
C01B33/107 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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