VAPOR GENERATING APPARATUS AND DEPOSITION APPARATUS,申请号KR20107017648-传众专利搜索

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发明名称	VAPOR GENERATING APPARATUS AND DEPOSITION APPARATUS
摘要
申请公布号	KR20100102210(A)	申请公布日期	2010.09.20
申请号	KR20107017648	申请日期	2009.02.12
申请人	ULVAC, INC.	发明人	NEGISHI TOSHIO
分类号	C23C14/24;H01L51/56	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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