发明名称 APPARATUS FOR BONDING SEMICONDUCTOR CHIP AND METHOD FOR DOING THE SAME
摘要 PURPOSE: A semiconductor chip bonding device and a bonding method thereof are provided to bond a semiconductor by applying a distribution load to a semiconductor chip. CONSTITUTION: A first jig(110) includes a first surface where a semiconductor chip(S) is attached. A second jig(120) is movably arranged so that a second surface is adjacent to the first surface. A semiconductor chip bonding device(100) includes an elastic film(130) which is elastically transformed in order to apply a distribution load to the semiconductor assembly.
申请公布号 KR20100101484(A) 申请公布日期 2010.09.17
申请号 KR20090019989 申请日期 2009.03.09
申请人 COMMAX CO., LTD. 发明人 KOO, KYOUNG HWAN;KIM, HUN HWA
分类号 H01L21/50 主分类号 H01L21/50
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