发明名称 |
APPARATUS FOR BONDING SEMICONDUCTOR CHIP AND METHOD FOR DOING THE SAME |
摘要 |
PURPOSE: A semiconductor chip bonding device and a bonding method thereof are provided to bond a semiconductor by applying a distribution load to a semiconductor chip. CONSTITUTION: A first jig(110) includes a first surface where a semiconductor chip(S) is attached. A second jig(120) is movably arranged so that a second surface is adjacent to the first surface. A semiconductor chip bonding device(100) includes an elastic film(130) which is elastically transformed in order to apply a distribution load to the semiconductor assembly.
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申请公布号 |
KR20100101484(A) |
申请公布日期 |
2010.09.17 |
申请号 |
KR20090019989 |
申请日期 |
2009.03.09 |
申请人 |
COMMAX CO., LTD. |
发明人 |
KOO, KYOUNG HWAN;KIM, HUN HWA |
分类号 |
H01L21/50 |
主分类号 |
H01L21/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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