APPARATUS AND METHOD FOR TESTING SEMICONDUCTOR DEVICE

摘要

PURPOSE: An apparatus and a method for testing a semiconductor device are provided to minimize the bending of a probe card. CONSTITUTION: A substrate support unit is mounted in a semiconductor device. A test head is provided on the top of the substrate support unit and has a base(420) which is connected to a probe card. A horizontal maintaining unit(500) applies load to the probe card to maintain the probe card horizontal.