METHOD FOR TREATING SEMICONDUCTOR PROCESSING COMPONENTS AND COMPONENTS FORMED THEREBY,申请号KR20107015114-传众专利搜索

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发明名称	METHOD FOR TREATING SEMICONDUCTOR PROCESSING COMPONENTS AND COMPONENTS FORMED THEREBY
摘要
申请公布号	KR20100101640(A)	申请公布日期	2010.09.17
申请号	KR20107015114	申请日期	2008.12.15
申请人	SAINT-GOBAIN CERAMICS AND PLASTICS, INC.	发明人	NARENDAR YESHWANTH;BUCKLEY RICHARD F.
分类号	H01L21/02;H01L21/322;H01L21/673	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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