CHAMBER SYSTEM FOR A MINUTE TEMPERATURE CONTROL

摘要

PURPOSE: A chamber system for a minute temperature control is provided to increase an adiabatic effect by forming a multilayered thin purge space on the wall of a chamber. CONSTITUTION: An air inlet(3) is installed on the outer side of a chiller head(2) of a chamber(1) and a nozzle(4) and a sensor(5) are installed on the lower side of the chiller head. A multilayered purge space with a thin thickness is formed on the wall of the chamber. A conduit makes the temperature of a process air close to a room temperature. The process air is discharged by forming a purge space and a process space while interposing a partition.