发明名称 METHODS FOR FORMING THREE-DIMENSIONAL MEMORY DEVICES, AND RELATED STRUCTURES
摘要 Methods of forming semiconductor devices that include one or more arrays of memory devices in a three-dimensional arrangement, such as those that include forming a conductive contact in a dielectric material overlying a memory array, wherein a wafer bonding and cleaving process may be utilized to provide a foundation material for forming another memory array having an active region in electrical contact with the conductive contact. Additionally, the conductive contact may be formed in a donor wafer, which in turn may be bonded to a dielectric material overlying a memory array using another wafer bonding process. Novel semiconductor devices and structures including the same may be formed using such methods, for example.
申请公布号 US2010230724(A1) 申请公布日期 2010.09.16
申请号 US20090402103 申请日期 2009.03.11
申请人 MICRON TECHNOLOGY, INC. 发明人 SINHA NISHANT;PARAT KRISHNA K.
分类号 H01L29/00;H01L21/00 主分类号 H01L29/00
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