Liquid Material Supplying Apparatus and Liquid Material Supplying Method

摘要

In order to apply a liquid material including a small number of bubbles, in particular almost no bubbles larger than a predetermined size, a liquid material supplying apparatus includes: a pressure tank applying a positive pressure higher than the atmospheric pressure to the liquid material; a syringe having a nozzle for discharging the liquid material; and a liquid path member forming a liquid path leading the liquid material from the pressure tank to the syringe; a valve member which is provided on the liquid path member and which opens/closes the liquid path; a bubble defoaming filter which is provided on the liquid path member between the syringe and the valve member and which removes bubbles from the liquid material lead in the liquid path member; and a pressure applying mechanism which starts/stops discharging the liquid material from the nozzle by selectively applying a first pressure higher than the atmospheric pressure and a second pressure lower than the first pressure.