DOUBLE-AXIAL ROTATION RATE SENSOR

摘要

The invention relates to a micromechanical rotation rate sensor comprising at least one substrate, wherein the rotation rate sensor comprises at least one first and one second seismic mass, which are coupled to each other by means of at least one coupling beam, and wherein the rotation rate sensor is designed in such a way that the rotation rate sensor can detect rotation rates about at least one first and one second sensitive axis, wherein each seismic mass is associated with at least one actuator unit, with which the deflection behavior of the seismic mass can be influenced.