| 摘要 |
<p>A probe card has: a circuit board; a supporting board, which is disposed below the circuit board and supports a plurality of contact members which are brought into contact with a subject to be inspected at the time of inspecting the subject; an elastic member, which is disposed below the circuit board but above the supporting board, is capable of containing a gas inside, has flexibility and applies predetermined contact pressure to the plurality of contact members when the contact members are brought into contact with the subject to be inspected; and a conductive section which is disposed inside of the elastic member, and electrically connects the circuit board and the contact member at the time of inspecting the subject. The conductive section has a conductive layer provided with an insulating layer having flexibility and a wiring layer formed on the insulating layer.</p> |
