发明名称 CLEANING DEVICE FOR INJECT HIGH-PRESSURE CLEANING LIQUID
摘要 PROBLEM TO BE SOLVED: To provide a low-cost cleaning device for inject high-pressure cleaning liquid, having a simplified structure, suppressing vibration of the device in cleaning, and achieving uniform cleaning. SOLUTION: In the cleaning device 1 for inject high-pressure cleaning liquid equipped with a plurality of injection nozzles 3 for injecting high pressure cleaning liquid in the shape of one straight line to clean, the number of nozzle holders 2 is three and the holders are adjacently arranged in parallel mutually. A central nozzle holder 2c and nozzle holders 2b on both sides are linearly reciprocated in reverse directions to each other by a common servo motor 30 via a reciprocating slider-crank mechanism 7, the mass of the central nozzle holder 2c is set to be double of the mass of each of the nozzle holders 2b on the both sides, and an amount r of eccentricity by the reciprocating slider-crank mechanism is made to be same in each of nozzle holders 2b and 2c. The nozzle holders 2b and 2c are reciprocated in the longitudinal direction of the nozzle holders 2b and 2c while an object x to be cleaned is conveyed in the direction orthogonal to the longitudinal direction of the nozzle holders 2b and 2c, and the high pressure cleaning liquid is injected from each of the injection nozzles 3 for cleaning at the same time. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010206143(A) 申请公布日期 2010.09.16
申请号 JP20090053244 申请日期 2009.03.06
申请人 KAWASAKI PLANT SYSTEMS LTD 发明人 NOMURA MITSURU;KUGE MORIMASA;TSUJITA CHIKAFUMI;TANAKA HIDEYUKI
分类号 H01L21/304 主分类号 H01L21/304
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