发明名称 SCANNING IMAGING DEVICE
摘要 A scanning imaging device has a spot light projecting section 101 that irradiates a first spot light for excitation and two second spot lights for focus detection onto a flow channel of a substrate 4 and an imaging section 102 for picking up an image of light emitted from a target of detection in the flow channel as it is excited by the first spot light. One of the second spot lights is reflected at the top surface of the flow channel and the other of the second spot lights is reflected at the bottom surface of the flow channel and a focus position adjustment mechanism for adjusting the focus position of each of the first and second spot lights in the depth direction of the flow channel such that the quantity of deviation of the focus positions of the first and second spot lights in the depth direction of the flow channel as determined by comparing the intensities of the one and the other of the second reflected lights reflected at the flow channel.
申请公布号 US2010230580(A1) 申请公布日期 2010.09.16
申请号 US20090744575 申请日期 2009.04.02
申请人 CANON KABUSHIKI KAISHA 发明人 MATSUMOTO KAZUHIRO
分类号 H01L27/00;G01J1/58;G01K11/00;G06F15/00 主分类号 H01L27/00
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