Scanning probe drive unit for moving probe of scanning probe microscope, particularly scanning force microscope, has probe mounting bracket for fixing probe holder with probe, where probe holder actuator is provided for moving probe holder

摘要

The scanning probe drive unit (10) is lithographically fabricated on a substrate (12), and has a probe mounting bracket (14) for fixing a probe holder (16) with a probe (18). A probe holder actuator (22) is provided for moving the probe holder. A fastener actuator (40) is brought into a release position where the probe holder is exchanged.