Verfahren zur Abscheidung von metallfreien Kohlenstoffschichten,申请号DE20021003730-传众专利搜索

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发明名称	Verfahren zur Abscheidung von metallfreien Kohlenstoffschichten
摘要
申请公布号	DE10203730(B4)	申请公布日期	2010.09.16
申请号	DE20021003730	申请日期	2002.01.30
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	BEWILOGUA, KLAUS;WITTORF, RALF;THOMSEN, HELGE
分类号	C23C14/34;C23C14/02;C23C14/06	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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