| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transfer method etc., in which use efficiency of a seed substrate such as a relatively expensive compound semiconductor substrate can be improved and even transfer between substrates differing in aperture can be efficiently performed. <P>SOLUTION: The transfer method for functional region includes transferring at least part of a functional region 106 disposed while bonded onto a first isolation layer 105 of a first substrate 103 to a second substrate 100. A second isolation layer 115 is provided in a region on the second substrate 100 to which the functional region is transferred. In a first process, the first substrate 103 and second substrate 100 are stuck and bonded together so that the functional region 106 and second isolation layer 115 come into contact with each other. In a second process, the first substrate 103 and functional region 106 are isolated at the first isolation layer 105. In a third process, an isolation groove 111 which penetrates the second substrate 100 and second isolation layer 115 from the surface of the second substrate 100 on the opposite side from the surface where the second isolation layer 115 is present is provided before or after the second process. <P>COPYRIGHT: (C)2010,JPO&INPIT |
