| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method capable of performing connection operation highly accurately. SOLUTION: The method for measuring an object to be measured while being divided into a plurality of partial domains, and measuring the whole shape of the object to be measured by connecting the plurality of partial domains includes steps S501-S511 for measuring the plurality of partial domains, a step S102 for fixing an error in a partial domain used as a reference, a step S105 for calculating each error in the plurality of partial domains, and a step S107 for connecting the plurality of partial domains by performing correction corresponding to each error. The steps S102-S107 are executed repeatedly by changing the partial domain used as the reference (S110). COPYRIGHT: (C)2010,JPO&INPIT
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