发明名称 FLOW SENSING DEVICE AND PACKAGING THEREOF
摘要 <p>There is described a flow sensing device having a semiconductor chip with a flow channel integrated therein and a sensing element positioned in the flow channel, and a package base attached to the semiconductor chip and allowing access to the two passage-openings of the flow channel from opposite sides of the package base.</p>
申请公布号 WO2010102403(A1) 申请公布日期 2010.09.16
申请号 WO2010CA00354 申请日期 2010.03.10
申请人 MICROBRIDGE TECHNOLOGIES INC.;LANDSBERGER, LESLIE;GRUDIN, OLEG;SALMAN, SAED;FROLOV, GENNADIY 发明人 LANDSBERGER, LESLIE;GRUDIN, OLEG;SALMAN, SAED;FROLOV, GENNADIY
分类号 G01F1/688;G01F15/14;G01L13/00 主分类号 G01F1/688
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