发明名称 METHOD OF MANUFACTURING MAGNETIC MEMORY DEVICE, AND MAGNETIC MEMORY DEVICE
摘要 PROBLEM TO BE SOLVED: To increase the output of a read element by reducing roughness produced at a boundary part between the free layer and the barrier layer of a magnetic thin wire, when manufacturing the magnetic thin wire used for a domain wall motion magnetic memory apparatus. SOLUTION: In a method of manufacturing a magnetic memory device having a data read part and a data write part arranged in the magnetic thin wire 1 for data recording which is made of a ferromagnetic material, a seed layer 11, the free layer 12 to which boron is added, the barrier layer 13, and a pinned layer 14 are laminated in this order, the magnetic thin wire 1 is formed by carrying out a heat treatment in this state to diffuse and remove the boron added to the free layer 12, and the data read part and data write part are formed on the formed magnetic thin wire 1. The magnetic memory apparatus is constituted by connecting a plurality of devices in parallel. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010205931(A) 申请公布日期 2010.09.16
申请号 JP20090049793 申请日期 2009.03.03
申请人 FUJITSU LTD 发明人 UMEHARA SHINJIRO;IBUSUKI TAKAHIRO;ASHIDA YUTAKA;OCHIAI TAKAO;SATO MASASHIGE
分类号 H01L43/12;G11C11/15;H01L21/8246;H01L27/105;H01L29/82;H01L43/08 主分类号 H01L43/12
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