REFLECTIVE ELECTRODE, DISPLAY DEVICE, AND METHOD FOR PRODUCING DISPLAY DEVICE

摘要

A reflective electrode (2) includes an aluminum alloy layer (2a) and an aluminum oxide layer (2b) arranged on or above a substrate and is directly connected to a transparent pixel electrode (3) without the interposition of a barrier metal layer. The aluminum alloy layer contains 0.1 to 2 atomic percent of nickel or cobalt and 0.1 to 2 atomic percent of lanthanum. The aluminum oxide layer has a ratio [O]/[Al] of the number of oxygen atoms [O] to the number of aluminum atoms [Al] of 0.30 or less. The aluminum oxide layer has a thickness in its thinnest portion of 10 nm or less. The reflective electrode has a high reflectance and a low contact resistance, even when subjected to a heat treatment at a low temperature of 100° C. or higher but 300° C. or lower. The reflective electrode also has excellent thermal stability and does not cause defects such as hillocks.