| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem of a conventional electrostatic chuck that a plate member decreases in area of contact with a tip face of a projection part formed on an attraction and fix face of a dielectric layer as the tip face and a side face are polished. SOLUTION: The electrostatic chuck includes the dielectric layer 30 formed with the attraction and fix face onto which the plate member 10 is attracted and fixed, wherein the attraction and fix face of the dielectric layer 30 is formed with a plurality of projection parts 32 each with only the tip face abutting on the plate member 10 formed as a flat face by grinding and formed with a coolant gas flow path 36 where a coolant gas flows opened to the flat face of each of the projection parts 32. COPYRIGHT: (C)2010,JPO&INPIT |
