| 摘要 |
PROBLEM TO BE SOLVED: To provide a deterioration diagnosing apparatus capable of inspecting a processing device at proper timing. SOLUTION: A deterioration diagnosing apparatus 100 includes: an inspection means (comprising, e.g., an inspection device 20 and a control device 10) for inspecting a processing device 30 to be inspected; and a deterioration detection means (deterioration detection device 40) for detecting correlation deterioration, which is deterioration of the inspection target that deteriorates in a manner correlated with deterioration of the processing device 30. The inspection means (the inspection device 20 and the control device 10) inspects the processing device 30 when the correlation deterioration is detected by the deterioration detection means (deterioration detection device 40). COPYRIGHT: (C)2010,JPO&INPIT
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