发明名称 |
ALIGNMENT APPARATUS, SUBSTRATES STACKING APPARATUS, STACKED SUBSTRATES MANUFACTURING APPARATUS, EXPOSURE APPARATUS AND ALIGNMENT METHOD |
摘要 |
The throughput of the alignment in an alignment apparatus is improved. There is provided an alignment apparatus for aligning a substrate having an alignment mark, including a first aligner that aligns the substrate to a first reference position, a second aligner that aligns a substrate holder to a second reference position before the substrate holder holds the substrate, and a position detector that detects a position of the alignment mark of the substrate after the substrate holder holds the substrate.
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申请公布号 |
US2010231928(A1) |
申请公布日期 |
2010.09.16 |
申请号 |
US20100704946 |
申请日期 |
2010.02.12 |
申请人 |
TANAKA YASUAKI;SANADA SATORU |
发明人 |
TANAKA YASUAKI;SANADA SATORU |
分类号 |
G01B11/14;G03B27/58 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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