| 发明名称 |
CYCLIC AMINO COMPOUNDS FOR LOW-K SILYLATION |
| 摘要 |
Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed.
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| 申请公布号 |
US2010233829(A1) |
申请公布日期 |
2010.09.16 |
| 申请号 |
US20100721362 |
申请日期 |
2010.03.10 |
| 申请人 |
AMERICAN AIR LIQUIDE INC. |
发明人 |
MCANDREW JAMES J.F.;ANDERSON CURTIS;DUSSARRAT CHRISTIAN |
| 分类号 |
H01L21/66;B01J19/00;C07F7/10 |
主分类号 |
H01L21/66 |
| 代理机构 |
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