FLUOROALKANESULFONIC ACID AMMONIUM SALTS AND METHOD FOR PRODUCING SAME

摘要

A fluoroalkanesulfinic acid ammonium salt is obtained using an organic base when a bromofluoroalkyl carboxylate ester is sulfinated using a sulfinating agent. The fluoroalkanesulfinic acid ammonium salt is oxidized, thereby obtaining a fluoroalkanesulfonic acid ammonium salt. The fluoroalkanesulfonic acid ammonium salt is used as a starting material and exchanged into an onium salt directly or through saponification or esterification, thereby obtaining a fluoroalkanesulfonic acid onium salt. The fluoroalkanesulfonic acid onium salt is useful as a photo-acid generating agent to be used for a chemically amplified resist material.