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发明名称
Positionsmessvorrichtung und Positionsmessverfahren in einer Halbleitereinkristallherstellungsvorrichtung
摘要
申请公布号
DE112008002267(T5)
申请公布日期
2010.09.16
申请号
DE200811002267T
申请日期
2008.08.25
申请人
SUMCO TECHXIV CORP.
发明人
HAYASHIDA, TOSHIO;KIHARA, AYUMI;MITANI, NAOJI
分类号
C30B29/06;C30B15/26
主分类号
C30B29/06
代理机构
代理人
主权项
地址
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