| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress occurrence of an abnormal shape in the seam portion of an optical irradiation region through a mask, in the machining of a three-dimensional shape by irradiation with light through the mask. <P>SOLUTION: An optical machining method comprises: a process of moving a light irradiation region in a direction orthogonal to the width direction of a mask M, by using the mask M in which a plurality of openings m1 are lined up in the width direction, while a substrate S as a workpiece is irradiated with light through the mask M; and a process in which, after the light irradiation for one width portion of the mask M and the movement of the irradiation region are completed, the light irradiation for one width portion in the succeeding step and the movement of the irradiation region are performed, and in which, for that purpose, a part of light irradiation portion by the light irradiation for one width portion in the preceding step and by the movement of the irradiation region is superimposed on a part of light irradiation portion by the light irradiation portion for one width portion in the succeeding step and by the movement of the irradiation region, so that the light irradiation quantity is equalized in respective irradiation lines corresponding to each of the plurality of the openings m1. <P>COPYRIGHT: (C)2010,JPO&INPIT |
