| 摘要 |
PROBLEM TO BE SOLVED: To provide an air filter pack that prevents the gas contamination of a filter, and to provide a method for packing an air filter. SOLUTION: A gas absorption material is inserted between front and rear surfaces of the air filter and a packing bag, thereby obtaining the air filter pack. Gas is removed from the pack, and the air filter pack with the gas absorption material enclosed therein is obtained. The insertion of the absorption material in the pack extremely reduces an amount of gas generated in a filter product. This prevents the air filter from causing the gas contamination in a semiconductor manufacturing process or the like. COPYRIGHT: (C)2010,JPO&INPIT |
