发明名称 ELECTRODE PAD STRUCTURE AND METHOD FOR PREPARING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To easily respond to densification of a wiring pattern. Ž<P>SOLUTION: An electrode pad structure includes a first-layer pad used as a pedestal and a second-layer pad provided on the top side of the first-layer pad and used as a junction layer. The second-layer pad is so provided as to cover the whole top side of the first-layer pad. A method for preparing the electrode pad structure includes at least the process wherein a resist coat of the second layer is so applied as to cover the first-layer pad, the process wherein only the upper part of the first-layer pad is exposed by exposing the resist coat of the second layer to light widely in the area without providing an exposure mask, and the process wherein plating is so applied as to cover the exposed portion of the upper part of the first-layer pad. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010203861(A) 申请公布日期 2010.09.16
申请号 JP20090048395 申请日期 2009.03.02
申请人 MICRONICS JAPAN CO LTD 发明人 UMEDA KANJI;SASAKI TOSHIMITSU
分类号 G01R1/073;G01R31/26;H01L21/66 主分类号 G01R1/073
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