METHOD FOR MANUFACTURING ELECTRONIC DEVICE AND APPARATUS FOR MANUFACTURING ELECTRONIC DEVICE
摘要
<p>Provided are a method for manufacturing an electronic device, wherein generation of warpage is suppressed, and an apparatus for manufacturing an electronic device. The method for manufacturing an electronic device includes a warpage suppressing step wherein the interim product of the electronic device is warped, and a heating step wherein the interim product is heated in the state where the interim product is warped.</p>
申请公布号
WO2010104001(A1)
申请公布日期
2010.09.16
申请号
WO2010JP53614
申请日期
2010.03.05
申请人
NEC CORPORATION;RENESAS ELECTRONICS CORPORATION;MURAI, HIDEYA;IIMORI, KIYOKAZU;MORI, KENTARO;YAMAMICHI, SHINTARO;KAWANO, MASAYA;SOEJIMA, KOUJI
