| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a unit shutter mechanism having a relatively simple structure. <P>SOLUTION: There are provided the unit shutter mechanism, the shutter structure including the unit shutter mechanism and an exposure apparatus including the shutter structure, wherein the unit shutter mechanism includes a lower substrate, an electrode positioned on the lower substrate, a spacer positioned on the peripheral edge of the electrode, a first mirror positioned on the spacer to be separated from the electrode and including a hole, an upper substrate positioned on the upper side of the lower substrate to face the lower substrate, and a second mirror positioned at the lower part of the upper substrate and superimposed on the hole. <P>COPYRIGHT: (C)2010,JPO&INPIT |
