| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical waveguide sensor having a short response time and high responsiveness. <P>SOLUTION: A waveguide layer 3 including a detection material 4 is formed on the inner surface of a tube body 2, and gas to be detected is introduced from one end side opening 2a of the tube body 2, and the gas to be detected is discharged from the other end side opening 2b. Meanwhile the other hand, laser light from a light source 5 is allowed to enter the waveguide layer 3 through a prism 6 for incidence, and waveguide light from the waveguide layer 3 is allowed to go out to a photodetector 7 through a prism 8 for outgoing. A chamber constituting a reaction space for reacting the gas to be detected with the detection material 4 is integrated with an optical waveguide. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
