| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical surface measuring device and method for measuring surface conditions, such as detailed height variation (bump), concavity and convexity, surface damage, and surface roughness at each site on a surface of an object to be measured. SOLUTION: The optical surface measuring device is characterized by measuring more correctly detailed surface conditions of an object to be measured by utilizing concurrently signals of an interferometer and focal error signals of a PSD. COPYRIGHT: (C)2010,JPO&INPIT
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