| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analysis device capable of suppressing interruption of X-ray measurement to the utmost, and analyzing an acquired measurement results accurately and quickly, when performing X-ray measurement in a prescribed angle range repeatedly in company with a temperature change. SOLUTION: This X-ray analysis device for detecting by an X-ray detector, an X-ray emitted from a sample when irradiating the sample with the X-ray is described as follows: X-ray diffraction measurement is performed, while changing a sample temperature following a temperature changing curve 39, and a plurality of diffraction line profiles 35 are drawn at intervals along longitudinal axes in a range from 2θ=5°to 2θ=40°; X-ray intensity data 35 (→) during movement in the forward direction wherein an angle is increased in a range from 5°to 40°are displayed on a screen from 5°toward 40°on an angle coordinate axis (abscissa of a coordinate display 36), and X-ray intensity data 35 (←) during movement in the reverse direction wherein the angle is reduced are displayed on the screen from 40°toward 5°on the same angle coordinate axis; and the forward/reverse display can be displayed by being switched by a switch icon 43. COPYRIGHT: (C)2010,JPO&INPIT
|
