MARKING METHOD USING LASER AND METHOD OF MANUFACTURING FLAT PANEL DISPLAY BY THE MARKING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a marking method free from cracking or thinning on glass when a cell constituting marking is formed on the surface of glass by using a laser beam, and to provide a method of manufacturing a flat panel display by the marking method.

SOLUTION: When marking composed of a plurality of cells is performed by irradiating a glass surface with a laser beam, a second harmonic laser beam is formed from a laser beam of a fundamental wavelength on the optical path of an optical resonator using a wavelength conversion element 36. A PID type Peltier element 37 is attached to the wavelength conversion element 36. The Peltier element 37 is feedback controlled by a Peltier driver 39 under a temperature detecting operation of a temperature detecting element 41, and is maintained at a constant temperature and stabilized.

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