| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet delivering apparatus capable of stably making the viscosity of a liquid material lowered to a required viscosity and achieving a highly precise delivery of liquid droplets. SOLUTION: The liquid droplet delivering apparatus includes: a liquid droplet delivering head 40 equipped with a nozzle 411 for delivering the liquid material L as the liquid droplets; a pipe body 81 connected with the liquid droplet delivering head 40 and feeding the liquid material L to the liquid droplet delivering head 40; an electrical heating element 821 provided on the outer peripheral side of the pipe body 81 and generating heat by energization; and an energizing means 84 for energizing the electrical heating element 821. COPYRIGHT: (C)2010,JPO&INPIT |
