| 摘要 |
<P>PROBLEM TO BE SOLVED: To stably perform flat-flowing conveyance and efficiently perform substrate processing in a substrate conveyance device. Ž<P>SOLUTION: A substrate conveyance device 1 for performing flat-flowing conveyance of a substrate G to be treated includes: a pair of rotation axes 2, 3 rotatably supported in the horizontal direction and arranged parallel; a pair of first pulley members 4 rotatably provided around an axis at a predetermined interval in one rotation axis; a pair of second pulley members 5 rotatably provided around an axis at a predetermined interval in the other rotation axis; a pair of first endless driving members 6, 7 wound between the first pulley members and the second pulley members facing each other in a substrate conveyance direction and provided to be movable along an orbit in both right and left sides of a substrate conveyance path by the rotation of the first pulley members and the second pulley members; a plurality of elastic linear members 8 installed in parallel between the pair of the first endless driving members while bent upward to be shaped in an arch; and a driving portion 14 for rotating one of the rotation axes around the axis. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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