发明名称 LASER DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a laser device which is operable immediately after replacement of a wavelength-converting optical element. <P>SOLUTION: A wavelength-converting optical element, which is used in a temperature-raised state, is accommodated in a case, together with a heater, to form an integrated element unit. A unit storage part 80 is provided in a control rack, and a reserve element unit 50' is stored in the unit storage part 80. A control part 70 starts supply of N<SB>2</SB>gas to an auxiliary element unit 50' and adjustment of temperature in the wavelength-converting optical element before the use time of the element unit being used in a laser head 10 reaches recommended replacement time. When the use time of the element unit reaches the recommended replacement time, the control part 70 performs control so that the wavelength-converting optical element of the auxiliary element unit 50' may be kept at a predetermined temperature while N<SB>2</SB>gas is supplied for predetermined preparation time. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010204176(A) 申请公布日期 2010.09.16
申请号 JP20090046775 申请日期 2009.02.27
申请人 NIKON CORP 发明人 MIWA SATOSHI
分类号 G02F1/37;H01S3/06;H01S3/10;H01S3/108 主分类号 G02F1/37
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