SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CARRYING METHOD, AND SUBSTRATE PROCESSING METHOD

摘要

<P>PROBLEM TO BE SOLVED: To eliminate unnecessary maintenance by re-executing the sequence that is the cause of an error in a substrate processing apparatus. Ž<P>SOLUTION: The substrate processing apparatus includes a carrying means of carrying a substrate into a processing chamber, and a first control means that controls the carrying means in accordance with automatic carrying processing including a substrate carrying sequence composed of a plurality of sequences, the sequence including at least one or more carrying operations executed when the substrate is carried and a decision step of checking every carrying operation by a sensor. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž