| 摘要 |
<p>Provided is a minimal flow rate liquid pump control device wherein the cost thereof can be reduced, and a minimal flow rate can be controlled with high accuracy. The amount of liquid within a liquid level adjuster (3) is measured to obtain measured values including the amount of reduced liquid, the average amount of reduced liquid, etc. In the range of minimal flow rate, it is difficult to directly measure the flow rate of liquid because the flow rate is infinitesimal. However, the total amount of liquid can be measured after the elapse of a certain period of time. Therefore, the measured value is compared with a value calculated on the basis of an instruction value, so that the difference between the actual amount of the transferred liquid and the calculated amount of the transferred liquid can be obtained. Further, if there is a difference therebetween, the instruction value is corrected to improve the accuracy of control of the flow rate. Further, the liquid level adjuster (3) which stores the liquid of a pump (2) is extremely less expensive than a expensive pump or flow rate measuring device. This prevents the cost for the entire system from increasing.</p> |
