Vorrichtung zur Schwingungsanregung eines einseitig in einem Rasterkraftmikroskop befestigten Federbalkens,申请号DE20051038245-传众专利搜索

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发明名称	Vorrichtung zur Schwingungsanregung eines einseitig in einem Rasterkraftmikroskop befestigten Federbalkens
摘要
申请公布号	DE102005038245(B4)	申请公布日期	2010.09.16
申请号	DE20051038245	申请日期	2005.08.12
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	ARNOLD, WALTER;SCHWARZ, KERSTIN;RABE, UTE
分类号	G01Q60/32;G01Q10/00;G01Q60/24;G01Q60/38	主分类号	G01Q60/32
代理机构		代理人
主权项
地址

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