| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device such that abnormality of a semiconductor peripheral part can be detected without processing a seal ring. SOLUTION: The abnormality of the peripheral part of the semiconductor device 1 can be detected by providing a plurality of electrode terminals 5, 6, 7, 8, and 9 on a semiconductor substrate 2 where a multilayer wiring layer is formed, forming impurity implanted regions (doped regions) 2a, 2b, and 2c electrically connecting seal rings 3, 4 provided to the outer peripheral part of the semiconductor substrate 2 to the electrode terminals 5, 6, 7, 8, and 9 on the semiconductor substrate 2, and then measuring resistance etc., between the electrode terminals 5, 6, 7, 8, and 9. COPYRIGHT: (C)2010,JPO&INPIT |
