| 摘要 |
<P>PROBLEM TO BE SOLVED: To evaluate the state of the wave front of light passing an inspecting object optical system at an interval finer than shear amount when shearing interference is used. Ž<P>SOLUTION: In this wave front evaluation method, the wave front of object light ILO is evaluated based on the interference fringes with the object light ILO and a shear light ILS. This wave front evaluation method includes determining a first phase distribution based on intensity distribution of the interference fringes of shearing interference of two orthogonal directions, determining a second phase distribution of differential wave front of two orthogonal directions based on the first phase distribution, determining an arithmetic expression corresponding to the second phase distribution using phase values at a plurality of lattice points arranged along the two directions of the wave front of the object light ILO, and determining the phase value at the plurality of lattice points using the second phase distribution and the arithmetic expression. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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