| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of inexpensively manufacturing a color filter having superior color reproducibility by restraining color mixture. SOLUTION: In this method, a device protective layer 36 is formed on a chip substrate 12a. A recessed part 37 is formed on the device protective layer 36. A porous silica layer 74 is formed on the device protective layer 36 to fill in the recessed part 37. Green/blue/red openings 76R, 76G, 76B are formed in order in the porous silica layer 74, and green/blue/red layers 83G, 83B, 83R corresponding to the colors of the openings are stacked in order on the porous silica layer 74 to fill in the opening every time each opening is formed. The respective surfaces of the respective color layers 83R, 83B, 83G and the porous silica layer 74 are subjected to polishing until a polishing stopper part 38, which is a peripheral edge part of the recessed part 37, is exposed, thereby forming a color filter 22 including the respective color pixels 40R, 40G, 40B and separation walls 41. COPYRIGHT: (C)2010,JPO&INPIT |
