| 摘要 |
PROBLEM TO BE SOLVED: To supply an ozone gas having a required concentration for a reaction even if the flow rate of the gas is varied. SOLUTION: In a vessel 30 for accumulating liquid ozone where liquefied ozone is accumulated in an ozone chamber 31 and a highly concentrated ozone gas is generated by volatilizing the liquefied ozone, a filter 35 to remove fine particles contained in the gas discharged from the ozone chamber 31 is cylindrical, the upper end of the filter 35 is connected to the ceiling of the chamber 31 and the lower end of the filter 35 is connected to the bottom of the chamber 31, piping 33 is communicated to the hollow part of the filter 35 for discharging the generated highly concentrated ozone gas, the ozone gas is diluted by introducing a diluting gas into the hollow part of the filter 35 and then the diluted gas is supplied to an apparatus located at the outside of the vessel 30. COPYRIGHT: (C)2010,JPO&INPIT
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