发明名称 Crystal Manufacturing Apparatus
摘要 A crystal manufacturing apparatus for manufacturing a group III nitride crystal includes a crucible that holds a mixed molten liquid including an alkali metal and a group III metal; a reaction vessel accommodating the crucible in the reaction vessel; a heating device that heats the crucible with the reaction vessel; a holding vessel having a lid that is capable of opening and closing, accommodating the reaction vessel and the heating device in the holding vessel; a sealed vessel accommodating the holding vessel in the sealed vessel, having an operating device that enables opening the lid of the holding vessel for supplying source materials into the crucible and taking out a manufactured GaN crystal under a sealed condition, and closing the lid of the holding vessel that is sealed in the sealed vessel, the sealed vessel including an inert gas atmosphere or a nitrogen atmosphere; and a gas supplying device for supplying a nitrogen gas to the mixed molten liquid through each of the vessels.
申请公布号 US2010229787(A1) 申请公布日期 2010.09.16
申请号 US20100748515 申请日期 2010.03.29
申请人 SARAYAMA SEIJI;IWATA HIROKAZU 发明人 SARAYAMA SEIJI;IWATA HIROKAZU
分类号 C30B9/00 主分类号 C30B9/00
代理机构 代理人
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