| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card with a probe having a high aspect ratio in its height direction, mounted thereon at a narrow pitch and with high precision. SOLUTION: The probe card is equipped with a substrate having a socket for fixing the probe. The probe is composed of: a mounting part having two projections to be fitted in the socket of the probe card; an arm part extending from the mounting part; and a head part disposed at the head of the arm part. The socket disposed on the substrate is composed of two fitting parts. COPYRIGHT: (C)2010,JPO&INPIT |
