| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate sticking device which guides an upper substrate to a lower substrate in the where the upper substrate is horizontally held without being bent. SOLUTION: The substrate sticking device is provided with support rods 36 for supporting each arm 32 extending from four parts in the horizontal and vertical directions of a holding plate 31 for holding the upper substrate. Then, each support rod 36 is moved downward by a support motor 37 to guide the upper substrate toward the upper surface of the lower substrate. A hanging member 44 which prevents bending of the upper substrate downward by the self-weight of the holding plate 31 and the upper substrate, is provided on the upper surface of the holding plate 31, and the hanging member 44 is moved downward by a hanging motor 48. When each support rod 36 is moved downward to move the upper substrate downward to the upper surface of the lower substrate, the hanging member 44 is moved downward by the hanging motor 48 while being synchronized with downward movement of each support rod 36. COPYRIGHT: (C)2010,JPO&INPIT
|
