| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma ignition device using both creeping discharge on an inner surface of a sidewall of an insulating body and aerial discharge to plasma crystallize the gas inside a chamber which can prevent abrupt consumption of a center electrode and an earth electrode by not having specific positions of each of the center electrode and the earth electrode used intensively for aerial discharge even in the case the creeping discharge occurs repeatedly at a specific position on the inner surface of the sidewall. SOLUTION: The circumference of the chamber is divided into several areas A1-A4 in the peripheral direction and coils C1-C4 which form magnetic fields for generating Lorentz forces F1-F4 which draw the plasma generated inside the chamber to an own area by creeping discharge are installed in each of the several areas in order to generate the Lorentz forces by energizing a selected coil among several coils, generate aerial discharge near the own area by drawing the plasma towards the own area, and have specific positions of each of the center electrode and the earth electrode not used intensively for aerial discharge. COPYRIGHT: (C)2010,JPO&INPIT
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