| 摘要 |
An electrostatic absorbing electrode is provided to sufficiently guarantee electrical connection with a feeder by using a heat-resistant synthetic resin film as an insulation layer adjacent to at least a base material such that the synthetic resin film has a characteristic of a high withstanding voltage and can be made of a thin film and by forming at least a part of an electrode layer by a spraying method. A first insulation layer is formed on a base material(41). An electrode layer is formed on the first insulation layer. A second insulation layer is formed on the electrode layer. The first insulation layer is formed by using a heat-resistance synthetic resin film(42). A part or all of the electrode layer is formed by a spraying method. The electrode layer has a conductive film region and a spray region for filling an opening formed in the conductive film region. The second insulation layer is formed by spraying. |
